포토리소그래피 화학 물질을 디스펜싱하는 장치입니다.
M7500
M610 650
M300
| Feature | M7500 | M610 650 | M300 |
|---|---|---|---|
| Primary Chemicals | Photoresist | High Viscosity Photoresist & Polyimides | Photoresist |
| Viscosity Range | 250-3000 cps | 300-30,000 cps | 0-300 cps |
| Max Dispense Volume | 16ml | 20 ml & 45 ml | 425 ml |
| Drive Gas | N/A | N/A | Nitrogen |
| # of outputs | 1 | 1 | Up to 3 |
| On board Source Switching | No | No | Yes |
| Internal Reservoir | No | No | Yes |
| Controller | On Board Controller requires PC to Connect | On Board Controller requires PC to Connect | External Controller Required |
| External Controller | N/A | N/A | Up to 4 pumps |
| Near Zero Loss (Prime Purge) | No | Yes | Yes |
| Dispense Detection | No | Yes | No |
| In Track Repair | No | No | No |
| Multiple Filter Option | Yes | For viscosities < 8000 cps | Yes |
| Standard Line Size | 1/4, 3/8 | 3/8, 1/2 | 1/4" input/output |