포토리소그래피 화학 물질을 디스펜싱하는 장치입니다.

  • M7500
  • M610 650
  • M300
스펙 설명 표 입니다.
Feature M7500 M610 650 M300
Primary Chemicals Photoresist High Viscosity Photoresist & Polyimides Photoresist
Viscosity Range 250-3000 cps 300-30,000 cps 0-300 cps
Max Dispense Volume 16ml 20 ml & 45 ml 425 ml
Drive Gas N/A N/A Nitrogen
# of outputs 1 1 Up to 3
On board Source Switching No No Yes
Internal Reservoir No No Yes
Controller On Board Controller requires PC to Connect On Board Controller requires PC to Connect External Controller Required
External Controller N/A N/A Up to 4 pumps
Near Zero Loss (Prime Purge) No Yes Yes
Dispense Detection No Yes No
In Track Repair No No No
Multiple Filter Option Yes For viscosities < 8000 cps Yes
Standard Line Size 1/4, 3/8 3/8, 1/2 1/4" input/output