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- M7500
- M610 650
- M300
Feature | M7500 | M610 650 | M300 |
---|---|---|---|
Primary Chemicals | Photoresist | High Viscosity Photoresist & Polyimides | Photoresist |
Viscosity Range | 250-3000 cps | 300-30,000 cps | 0-300 cps |
Max Dispense Volume | 16ml | 20 ml & 45 ml | 425 ml |
Drive Gas | N/A | N/A | Nitrogen |
# of outputs | 1 | 1 | Up to 3 |
On board Source Switching | No | No | Yes |
Internal Reservoir | No | No | Yes |
Controller | On Board Controller requires PC to Connect | On Board Controller requires PC to Connect | External Controller Required |
External Controller | N/A | N/A | Up to 4 pumps |
Near Zero Loss (Prime Purge) | No | Yes | Yes |
Dispense Detection | No | Yes | No |
In Track Repair | No | No | No |
Multiple Filter Option | Yes | For viscosities < 8000 cps | Yes |
Standard Line Size | 1/4, 3/8 | 3/8, 1/2 | 1/4" input/output |